Remote plasma source for agggresive and corrosive gases

SEMI-KLEEN sapphire remote plasma cleaner is an upgrade over standard SEMI-KLEEN plasma cleaner to support aggressive and corrosive process gases. Plasma chamber has been replaced with more chemcially resistant sapphire tube. Vacuum seal design and chamber material selection have been optimized to support corrosive radicals inside the plasma. For applications that hydrogen plasma etching of quartz chamber is a concern, SEMI-KLEEN sapphire is a better choice over traditional quartz chamber hydrogen plasma source.


Remote plasma cleaner for corrosive plasma SEMI-KLEEN plasma cleaner controller

SEMI-KLEEN Sapphire remote plasma source


SEMI-KLEEN sapphire remote plasma source has been used to deposit thin films, clean samples surface prior to thin film deposition in atomic layer deposition systems and clean carbon and oxygen contaminations from metal surface for projects carried out in NIST. Customer results show that SEMI-KLEEN plasma source can clean carbon and oxygen contaminants from InGaAs sample with just 2 second hydrogen plasma. Highly efficient hydrogen plasma source requies low pressure discharge capability. Otherwise, atomic hydrogen will recombine and lose its effectiveness.

Hydrogen plasma cleaning for InGaAs samples before ALD deposition

XPS analysis of contaminated InGaAs samples before and after 2 second hydrogen plasma cleaning