About Us


PIE Scientific specializes in developing advanced plasma systems for plasma etching, cleaning, surface treatment, ion and electron beam production applications. Our company is founded by alumni of the Plasma and Ion Source Technology group in the Lawrence Berkeley National Laboratory. After 15 years of experience in developing advanced semiconductor capital equipment in Silicon Valley, we realized that many existing low-cost plasma cleaners and plasma treatment systems are still using decades-old technology. Therefore, we decided to bring the state-of-the-art plasma technology developed for the semiconductor industry and nuclear research into affordable plasma instruments. Our SmartClean™ technology has been well-received by customers.

PIE Scientific LLC Office

Besides plasma cleaning and etching equipment, we also develop customized high-efficient high-brightness ion or electron sources for academic and industrial research laboratories. Additionally, we can provide electron and ion optics design solutions for sub-nm resolution.

We are located in the San Francisco Bay Area, close to the city of San Francisco and the Silicon Valley. To expand our production capability, we moved our facility from the City of San Mateo to Union City in May 2017.

our customers includes

Intel logo
Qualcomm logo
Google Logo
Amazon Logo
Illumina logo
Honeywell AreoSpace Logo
Harvard University Logo
MIT Logo
UC Berkeley Logo
Caltech Logo
NIH Logo
CNRS France Logo
Max Planck Institute Logo
Tsinghua Qinghua University Logo

Global customer coverage map

PIE Scientific LLC global customer coverage map

PIE Scientific LLC Factory Location

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