Multipurpose chamber for TEM/SEM sample and holder cleaning, TEM specimen holder vacuum storage, and SEM/FIB chamber in-situ cleaning
The multipurpose chamber can be configured for different applications with different external accessories such as EM-KLEEN remote plasma source and/or TEM specimen holder adapters. EM-KLEEN remote plasma source can be used to generate oxygen or hydrogen radicals using ambient air, O2, H2, or mixed gases to generate plasma for sample cleaning and surface activation. If the chamber is equipped with TEM specimen holder adapters, it can be used as a vacuum storage station. The multipurpose chamber can accept a total of six TEM specimen holders from Thermo-Fisher (FEI), JEOL, and Hitachi. Of course, the EM-KLEEN plasma source can also be taken out and installed on SEM, TEM, FIB, XPS, and other high vacuum chambers for in-situ chamber and sample plasma cleaning.
Configuration 1: EM-KLEEN plasma cleaner on the multipurpose vacuum chamber
Applications: EM-KLEEN in-situ plasma cleaner or remote plasma source generates oxygen or hydrogen radicals using room air, oxygen, or Hydrogen as the process gas. Sample can be loaded from the top glass door. EM-KLEEN plasma source can also be taken out and installed on a separate SEM, FIB & XPS system chamber for in-situ chamber and sample cleaning.
Configuration 2: EM-KLEEN plasma cleaner and TEM specimen holder adapters on the multipurpose chamber.
Applications: EM-KLEEN plasma cleaner for SEM & TEM sample cleaning. The sample can be loaded through the top glass door or inserted through the TEM specimen holder. EM-KLEEN plasma cleaner can also be taken out and installed on an SEM, FIB & XPS system for in-situ chamber and sample cleaning. Chamber can be pumped by an oil-free dry scroll pump or a turbopump station.
Configuration 3: Multipurpose chamber as TEM specimen holder vacuum storage station
TEM specimen holder adapters installed on the chamber as the specimen & holder vacuum storage chamber. The chamber can be pumped by an oil-free dry scroll pump or a turbopump station. Support a total of six TEM specimen holders. It can be configured to support JEOL, Hitachi & Thermo-Fisher (FEI) TEM specimen holders.