Which Tergeo fits your lab?Plasma cleaning for optics, laser and fiber components
A monolayer of organic contamination is enough to weaken an epoxy joint on a fiber ferrule, cause a coating to delaminate, or absorb laser power on an optical surface. Low-pressure plasma removes it from every face of the part — without touching, wiping or solvents.
- Gentle downstream mode for coated optics
- Better epoxy & adhesive bonding
- O₂, Ar, H₂, H₂O plasma
Where photonics manufacturers use plasma cleaning
Fiber end faces & ferrules
Clean and activate fiber heads, ferrules and V-grooves before epoxy potting and active alignment for stronger, more reliable bonds.
Lens, prism & window bonding
Remove handling and outgassing residues before optical adhesive bonding and UV-cure assembly.
Laser diodes & submounts
Clean submounts, heat sinks and packages before die attach, wire bonding and lid sealing. Cleaning before wire bonding.
Before optical coating
Final in-vacuum or pre-load clean of substrates before AR, HR and filter coatings for better adhesion and fewer defects.
AR-coated & delicate optics
Downstream (remote) plasma removes organic films from optics with antireflective layers without ion bombardment.
EUV & X-ray mirrors
Carbon removal from multilayer mirrors and optics chambers. EUV contamination control.
Choosing a plasma for optical parts
| Part / surface | Suggested plasma | Mode |
|---|---|---|
| Glass, fused silica, ceramics, ferrules | O₂, H₂O or Ar + O₂ | Direct for speed; downstream for finished parts |
| AR / dielectric-coated optics | O₂ or Ar + O₂, low power | Downstream, pulsed |
| Gold, silver, copper and other oxidation-sensitive metals | Ar or Ar + H₂ | Direct or downstream |
| Polymer optics and housings | O₂, air, N₂ | Short time; bond soon after treatment |
Start conservatively and verify with water contact angle or bond-strength tests; our engineers can suggest starting recipes for your materials.
Tergeo plasma cleaners for photonics
Tergeo
Ø110 mm chamber for fibers, ferrules, lenses and small assemblies.
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Tergeo-Plus
Ø160 mm chamber and up to 500 W for trays of parts.
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Tergeo-Pro
Ø230 mm chamber with a quartz shelf for batches and larger optics.
Details →Related: epoxy, metal & composite bonding · surface activation & cleaning · plasma surface treatment
Not sure which plasma cleaner fits your process?
Tell us your samples, size and process gas. Our engineers reply within one to two business days with a recommendation and a quote.