Gas mixer for SEMI-KLEEN and EM-KLEEN series remote plasma source
SEMI-KLEEN or EM-KLEEN series remote plasma source can only accept one gas input. For some research projects, users may need to mix multiple process gases for SEMI-KLEEN or EM-KLEEN remote plasma sources. Three-port gas mixer listed here integrates up to three mass flow controlled gas input ports, one venting/bypass pumping port, and one mixed gas output port. The gas output port should be connected to the gas input port on the SEMI-KLEEN or EM-KLEEN remote plasma cleaners. Venting/bypass pumping port offers a high conductance pumping route to evacuate gas tubing if high purity gas delivery is required.
- Touchscreen user interface
- Up to three mass flow controlled gas input port
- Venting/bypassing port for venting chamber and pumping down gas tubing at high speed.
- Flow rate compensation for different gas species
- Integrated timer
- 110~230V universal AC power input.