Plasma cleaning, etching & surface treatment equipment · designed and built in CaliforniaVolume & academic pricing
Introduction

What is plasma surface treatment?

Plasma surface treatment is a dry process that exposes a part to an ionized gas, the plasma, to clean its surface and change the chemistry of the top few nanometers. The treated surface has a higher surface energy, so water, adhesives, paints, inks and coatings spread over it and bond to it instead of beading up.

  • Works on polymers, glass, metals and ceramics
  • No solvents or primers
  • Seconds to minutes per batch
How it works

How plasma surface treatment works

Inside a plasma, free electrons are accelerated by an electric field, usually radio-frequency (RF) power at 13.56 MHz, and split the gas molecules into reactive atoms, ions and ultraviolet light. The gas itself stays near room temperature. These species do three things at the surface.

Schematic of plasma surface treatment in three steps: a contaminated surface where water beads up, oxygen plasma species removing hydrocarbons as carbon dioxide and water and adding polar groups, and a clean high-energy surface where water spreads
Figure 1. Plasma surface treatment in three steps. The plasma removes the thin hydrocarbon film that every surface collects from air, then adds polar groups such as –OH and C=O. Only the top few nanometers change.

1. Cleaning

Oxygen atoms oxidize oils, fingerprints, mold-release agents and adsorbed hydrocarbons to CO₂ and water vapor, which the vacuum pump removes. This alone often explains why a part that would not bond suddenly does.

2. Activation

Reactive atoms break C–H bonds and attach polar groups: hydroxyl, carbonyl and carboxyl with oxygen, amine-type groups with nitrogen. Polar groups raise the surface energy and give adhesives something to bond to.

3. Etching and cross-linking

Ion bombardment roughens a surface on the nanometer scale and, in argon plasma, cross-links the top polymer chains. Fluorine-containing gases do the opposite of activation and leave a water-repellent surface.

Results

What changes after treatment

The easiest way to see plasma surface treatment is a drop of water. On an untreated polymer, contaminated glass or air-exposed aluminum the drop stands up: polycarbonate, for example, has a water contact angle of about 80–90° and PET about 70–80°. After an oxygen plasma the same drop spreads into a thin film. A fluorinated plasma can instead push the contact angle above 100°.

That change in wetting is what manufacturers and researchers use:

  • Bonding and adhesion: epoxy and adhesive joints, polymer–metal bonds, and wire bonding in electronics packaging
  • Microfluidics: irreversible PDMS-to-glass bonding and hydrophilic channels
  • Medical devices and cell culture: catheters, implants and well plates with controlled wettability
  • Coating and printing: better adhesion of paint, ink, parylene and optical coatings
  • Hard-to-bond plastics: PP, PE and PTFE, PFA and FEP
Water droplet on aluminum: beaded on the air-exposed surface, spread flat after oxygen plasma treatment, and beaded again after a hydrophobic plasma treatment
Water on aluminum in a Tergeo plasma system: (a) as received, (b) after oxygen plasma, (c) after a hydrophobic plasma treatment.
Water droplet on a glass slide: low dome when air exposed, spread flat after oxygen plasma, round bead after hydrophobic treatment
Glass slide: (a) air exposed, (b) after oxygen plasma, (c) after hydrophobic treatment.
Water contact angle on a polymer before oxygen plasma treatment, right after, 3 hours after and 3 days after, showing gradual hydrophobic recovery
A polymer before treatment, right after oxygen plasma, and 3 hours and 3 days later. The surface slowly recovers, so bond or coat soon after treatment.
Process gases

Which gas to use for plasma surface treatment

The gas decides which groups end up on the surface. A vacuum system with mass-flow controllers can switch between them or mix them.

GasMain effect on the surfaceTypical use
Oxygen (O₂)Removes organics; adds –OH, C=O and –COOH; strongly hydrophilicMost polymers, glass, PDMS bonding, general cleaning
Argon (Ar)Physical cleaning by ion bombardment; cross-links polymers; no oxidationMetals and bond pads, oxidation-sensitive parts
Nitrogen (N₂)Adds amine and amide groups; moderate hydrophilicityBiomolecule attachment, biocompatibility
AirOxygen and nitrogen groups in one stepLow-cost activation of plastics, metals and glass
Water vapor (H₂O)Dense hydroxyl layer; hydrophilicity that lasts longerMicrofluidics, cell culture, oxide surfaces
Hydrogen (H₂)Removes fluorine and reduces oxidesPTFE activation, oxide-free metal surfaces
CF₄ and other fluorine gasesDeposits or grafts fluorinated groups; contact angle above 100°Water-repellent surfaces, etching of oxides and nitrides
Two ways to do it

Vacuum or atmospheric plasma surface treatment

Plasma surface treatment is done either in a vacuum chamber at low pressure or with a plasma nozzle in open air. Both use the same chemistry; they differ in what kind of part they suit.

Comparison schematic: a vacuum plasma chamber in which the glow surrounds 3D parts on a shelf, and an atmospheric plasma nozzle treating a flat sheet moving underneath it on rollers
Figure 2. Vacuum (low-pressure) plasma treats whole batches of 3D parts in a chamber. An atmospheric-pressure nozzle treats a moving part along its path on a production line.

Vacuum (low-pressure) plasma

Parts sit in a chamber pumped to roughly 0.1–1 Torr. The glow fills the chamber, so the inside of a tube, the channels of a microfluidic chip and the back of a part are treated as well as the front. Gas choice is wide, and gentle modes such as downstream (remote) and pulsed plasma are available for delicate materials. This is the usual choice for laboratories, medical devices, electronics and small to medium production batches.

Atmospheric-pressure plasma

A nozzle or a corona discharge blows activated air or nitrogen onto the part, with no chamber and no pump. It fits inline on a conveyor and suits large flat parts, films, sheets and profiles that move past the nozzle. Only the area the plasma passes over is treated, and gas choice is narrower.

How a vacuum plasma system works

FAQ

Plasma surface treatment questions

What is the difference between plasma cleaning and plasma surface treatment?

They happen in the same machine and often in the same run. Plasma cleaning means removing contamination. Plasma surface treatment usually means the step after that: changing the surface chemistry to make it hydrophilic, hydrophobic or easier to bond.

Does plasma surface treatment damage the part?

No, when the recipe suits the material. Only the top few nanometers change, so strength, color and transparency stay the same. Very long or high-power runs can etch or roughen soft polymers, which is why power, time and gas are set for each material.

How long does the treatment take?

Typically from a few seconds to a few minutes of plasma time, plus the time to pump the chamber down. Heavily contaminated parts need longer cleaning first.

How long does the effect last?

On polymers, the surface slowly turns back toward its original state over hours to days as polymer chains move and polar groups turn inward, and as the surface picks up new contamination. Bond, coat or print soon after treatment, store treated parts clean and sealed, or use water-vapor plasma for a more stable surface. Glass and metal oxides recover mainly through recontamination.

How do I know the treatment worked?

The quickest check is a water contact angle measurement or a dyne test. A drop that spreads into a thin film shows a high-energy surface. For bonding, a peel or shear test on treated parts is the final proof.

Read more

References

  1. E. M. Liston, L. Martinu and M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review,” Journal of Adhesion Science and Technology 7 (1993) 1091–1127. doi:10.1163/156856193X00600
  2. F. D. Egitto, “Plasma etching and modification of organic polymers,” Pure and Applied Chemistry 62 (1990) 1699–1708. doi:10.1351/pac199062091699
  3. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 2nd ed., Wiley, 2005.
Equipment

Tergeo plasma surface treatment systems

Tergeo tabletop plasma systems treat parts in a quartz chamber with up to three mass-flow-controlled gas lines, 13.56 MHz RF power, direct (and on most models downstream) modes and pulsed plasma. Chambers range from Ø110 mm (Tergeo) to Ø230 × 340 mm (Tergeo-Pro).

Tergeo-Plus tabletop plasma surface treatment system with touchscreen and quartz chamber
Tergeo-Plus tabletop plasma system.

Not sure which plasma cleaner fits your process?

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