Which Tergeo fits your lab?OEM remote plasma sources for equipment makers
SEMI-KLEEN and EM-KLEEN sources can be built into semiconductor e-beam equipment, film-coating tools, XPS systems and electron microscopes — specified, qualified and supplied as an OEM component.
Plasma sources inside your customers' fabs and labs
Our OEM partners include semiconductor, thin-film, surface-analysis and electron-microscope manufacturers. All OEM relationships are confidential — we never publish partner names.
Semiconductor e-beam metrology & inspection
CD-SEM, e-beam defect inspection and review tools.
E-beam & EUV tools →EUV & e-beam lithography
Carbon contamination control for optics and vacuum chambers.
EUV lithography →Film-coating equipment
ALD, sputter and evaporation tools — sample pre-clean and chamber cleaning.
Film-coating tools →Surface analysis
XPS, AES and SIMS systems — hydrocarbon-free analysis and load-lock sample preparation.
XPS, SIMS, AES →Electron microscopes & FIB
EM-KLEEN on SEM, FIB and TEM chambers and sample exchange ports.
EM-KLEEN →UHV & research systems
Faster pump-down and lower background in UHV and XHV chambers.
UHV cleaning →Choose the source for your platform
| Source | Best for | Chemistries | Details |
|---|---|---|---|
| SEMI-KLEEN Quartz | Semiconductor e-beam, EUV, ALD and PVD tools | Air, O₂, Ar + O₂, H₂, Ar + H₂, He, N₂ | Specs |
| SEMI-KLEEN Sapphire | Oxide removal, fluorine-sensitive optics chambers | H₂, NF₃, CF₄, SF₆ | Specs |
| SEMI-KLEEN UHV | UHV / XHV chambers and surface science | Two gases mixed by external MFCs; DN40CF flange | Specs |
| EM-KLEEN | SEM, FIB, TEM, XPS and SIMS chambers | Air and oxygen-based plasma | Specs |
From first drawing to volume supply
Requirements
Chamber volume, port, gases, contamination target and controller interface — under NDA.
Mechanical fit
Flange, orientation, cable and gas-line routing for your tool frame.
Recipe development
Gas, power, pressure and time tuned on your chamber; RGA or witness-sample data.
Controller integration
RS-232/RS-485 command set, interlocks and a 3U half-width rack-mount controller.
Qualification & supply
Configuration control and long-term supply from our California factory.
A plasma partner, not a catalog
- Designed and manufactured in Union City, California
- Confidential engineering under NDA
- Custom flanges, lengths and connectors
- Application engineers who speak vacuum and semiconductor
OEM questions
Can we evaluate a source on our tool before committing?
Yes. We typically start with an evaluation unit and joint recipe development on your chamber. Contact us to set up an NDA.
How is the source controlled by our software?
Through an RS-232 / RS-485 command set for recipe selection, start/stop and status read-back, plus hardware interlocks.
Who are your OEM customers?
Leading semiconductor, thin-film, surface-analysis and electron-microscope manufacturers. Our agreements are confidential, so we do not publish names.
Not sure which plasma cleaner fits your process?
Tell us your samples, size and process gas. Our engineers reply within one to two business days with a recommendation and a quote.